The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2015
Filed:
Mar. 27, 2013
Applicant:
Fei Company, Hillsboro, OR (US);
Inventor:
Marcus Straw, Portland, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/12 (2014.01); B23K 26/16 (2006.01); B23K 26/36 (2014.01); B23K 26/06 (2014.01); B23K 28/02 (2014.01); B23K 15/08 (2006.01); B23K 26/30 (2014.01); H01J 37/22 (2006.01); H01J 37/305 (2006.01); B23K 26/00 (2014.01);
U.S. Cl.
CPC ...
B23K 26/0648 (2013.01); B23K 15/08 (2013.01); B23K 26/0624 (2015.10); B23K 26/0635 (2013.01); B23K 26/12 (2013.01); B23K 26/122 (2013.01); B23K 26/127 (2013.01); B23K 26/1224 (2015.10); B23K 26/16 (2013.01); B23K 26/346 (2015.10); B23K 26/36 (2013.01); B23K 26/362 (2013.01); B23K 26/365 (2013.01); B23K 26/427 (2013.01); B23K 26/706 (2015.10); B23K 28/02 (2013.01); H01J 37/226 (2013.01); H01J 37/3056 (2013.01); B23K 26/00 (2013.01);
Abstract
A method and apparatus to perform laser ablation in the vicinity of a charged particle beam while simultaneously protecting the light optical components of the apparatus utilized to perform the ablation from being coated with debris resulting from the ablation process. According to preferred embodiments of the present invention, a protective transparent screen is used to shield the laser optical components. A preferred screen could be replaced or repositioned without breaking vacuum in the sample chamber and would not be particularly susceptible to undesirable charging effects.