The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2015
Filed:
Feb. 04, 2013
Colin Farrell, Tucson, AZ (US);
Jan Van Burken, Tucson, AZ (US);
Colin Farrell, Tucson, AZ (US);
Jan van Burken, Tucson, AZ (US);
BRUKER NANO INC., Santa Barbara, CA (US);
Abstract
A side camera is combined with a conventional optical metrology system to image the object during the focusing scan performed in normal focusing procedures. The camera is positioned in fixed spatial relation to the objective and with its focal plane in substantial alignment with the optical axis of the objective so as to image the object during the scan. The camera is used to monitor the illumination spot formed on the object by the beam projected through the system's objective. The in-focus position is found by moving the object such that the illumination spot coincides with the objective's focus seen through the camera.