The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2015
Filed:
Jul. 27, 2006
Aaron T. Radomski, Wyoming, NY (US);
Jonathan Smyka, Scottsville, NY (US);
Daniel J. Lincoln, Brockport, NY (US);
Yogendra Chawla, Pittsford, NY (US);
David J. Coumou, Webster, NY (US);
Vadim Lubomirsky, Rochester, NY (US);
Aaron T. Radomski, Wyoming, NY (US);
Jonathan Smyka, Scottsville, NY (US);
Daniel J. Lincoln, Brockport, NY (US);
Yogendra Chawla, Pittsford, NY (US);
David J. Coumou, Webster, NY (US);
Vadim Lubomirsky, Rochester, NY (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
A scalable radio frequency (RF) generator system including at least one power supply, at least one power amplifier receiving input from the power supply, and a power supply control module, and a system controller. Output from the at least one power supply can be combined and applied to each of the power amplifiers. Output form each of the at least one power amplifiers can be combined to generate a single RF signal. A compensator module controls operation of the at least one power supply. The compensator module, system control module, and power supply controller communicate in a daisy chain configuration.