The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2015

Filed:

Mar. 15, 2010
Applicants:

Stephan Voser, Grabs, CH;

Oliver Rattunde, Werdenberg, CH;

Martin Dubs, Maienfeld, CH;

Gerald Feistritzer, Bregenz, AT;

Volker Wuestenhagen, Feldkirch, AT;

Gerhard Dovids, Maienfeld, CH;

Inventors:

Stephan Voser, Grabs, CH;

Oliver Rattunde, Werdenberg, CH;

Martin Dubs, Maienfeld, CH;

Gerald Feistritzer, Bregenz, AT;

Volker Wuestenhagen, Feldkirch, AT;

Gerhard Dovids, Maienfeld, CH;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); H01L 21/67173 (2013.01); H01L 21/67196 (2013.01); H01L 21/67201 (2013.01); H01L 21/67207 (2013.01);
Abstract

Throughput of manufacturing thin-film solar panels by inline technique is made substantially independent from the time extent of different surface treatment steps by accordingly subdividing treatment steps in sub-steps performed in inline subsequent treatment stations. Treatment duration in each of the subsequent treatment stations is equal(τ).


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