The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2015
Filed:
Jun. 21, 2012
Applicants:
Yoshihiro Kai, Koshi, JP;
Satoshi Kaneko, Koshi, JP;
Inventors:
Yoshihiro Kai, Koshi, JP;
Satoshi Kaneko, Koshi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67051 (2013.01);
Abstract
A two-fluid nozzlefor spraying, toward a processing target object, droplets of a processing solution which are formed by mixing the processing solution discharged from a liquid discharge portionand a gas discharged from a gas discharge openingcan uniformly spray the droplets of the processing solution having small diameters. Here, the liquid discharge portionincludes a multiple number of liquid discharge openingsarranged along a circle inside the gas discharge opening, and the multiple number of liquid discharge openingsdischarge the processing solution in an outward direction of the circle.