The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2015
Filed:
Oct. 31, 2007
Masaya Ehira, Takasago, JP;
Katsutoshi Takagi, Takasago, JP;
Toshihiro Kugimiya, Takasago, JP;
Yoichiro Yoneda, Takasago, JP;
Hiroshi Gotou, Kobe, JP;
Masaya Ehira, Takasago, JP;
Katsutoshi Takagi, Takasago, JP;
Toshihiro Kugimiya, Takasago, JP;
Yoichiro Yoneda, Takasago, JP;
Hiroshi Gotou, Kobe, JP;
Kobe Steel, Ltd., Kobe-shi, JP;
KOBELCO RESEARCH INSTITUTE, INC., Kobe-shi, JP;
Abstract
The invention relates to an Al—Ni—La system Al-based alloy sputtering target where a total area of an Al—Ni system intermetallic compound having an average particle diameter of 0.3 μm to 3 μm with respect to a total area of the entire Al—Ni system intermetallic compound is 70% or more in terms of an area fraction, and a total area of an Al—La system intermetallic compound having an average particle diameter of 0.2 μm to 2 μm with respect to a total area of the entire Al—La system intermetallic compound is 70% or more in terms of an area fraction.