The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 08, 2015

Filed:

Oct. 23, 2013
Applicant:

Mks Instruments, Inc., Andover, MA (US);

Inventors:

David Neumeister, Loveland, CO (US);

Bradly Lefevre, Lakewood, CO (US);

Kevin Grout, Denver, CO (US);

Youfan Gu, Superior, CO (US);

Assignee:

MKS Instruments, Inc., Andover, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
F16K 51/02 (2006.01); F16K 27/00 (2006.01); F16K 41/10 (2006.01); F16K 27/02 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
F16K 27/00 (2013.01); C23C 16/4412 (2013.01); F16K 27/02 (2013.01); F16K 41/10 (2013.01); F16K 51/02 (2013.01); Y10T 137/0318 (2015.04); Y10T 137/7043 (2015.04); Y10T 137/87877 (2015.04);
Abstract

An expandable and contractible shield around a bellows in a valve protects the bellows from corrosive gases and solid particles in the valve chamber. In a manifold valve assembly with multiple outlet ports and multiple valves in a common valve chamber, a respective expandable and contractible shield around each respective bellows of each respective valve in the assembly separates each bellows from corrosive gases and solid particles in the common valve chamber regardless of whether one or all of the valves in the assembly is opened or closed.


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