The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2015
Filed:
Feb. 06, 2013
Applicants:
Nikon Corporation, Chiyoda-ku, Tokyo, JP;
Nikon Metrology NV, Leuven, BE;
Inventors:
Daisuke Kitazawa, Chigasaki, JP;
Patrick Blanckaert, Boortmeerbeek, BE;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01); B29C 37/00 (2006.01); G02B 27/00 (2006.01); G02B 13/24 (2006.01);
U.S. Cl.
CPC ...
B29C 37/00 (2013.01); G01B 11/24 (2013.01); G02B 13/24 (2013.01); G02B 27/00 (2013.01); G02B 27/0025 (2013.01);
Abstract
There is provided a measuring apparatus including: an imaging optical system configured to form an image of an object to be measured; and an imaging section including a transmissive member which is arranged in the vicinity of an image plane of the imaging optical system to be inclined with respect an optical axis of the imaging optical system. The imaging optical system includes a first optical member which is non-coaxial with respect to the optical axis.