The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 01, 2015

Filed:

Feb. 28, 2012
Applicants:

Christian Leirer, Regensburg, DE;

Anton Vogl, Sinzing, DE;

Andreas Biebersdorf, Regensburg, DE;

Rainer Butendeich, Regensburg, DE;

Christian Rumbolz, Lappersdorf, DE;

Inventors:

Christian Leirer, Regensburg, DE;

Anton Vogl, Sinzing, DE;

Andreas Biebersdorf, Regensburg, DE;

Rainer Butendeich, Regensburg, DE;

Christian Rumbolz, Lappersdorf, DE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 33/00 (2010.01); H01L 21/02 (2006.01); H01L 33/20 (2010.01); H01L 33/22 (2010.01);
U.S. Cl.
CPC ...
H01L 33/0075 (2013.01); H01L 21/0237 (2013.01); H01L 21/0254 (2013.01); H01L 21/02458 (2013.01); H01L 21/02494 (2013.01); H01L 21/02502 (2013.01); H01L 21/02664 (2013.01); H01L 33/007 (2013.01); H01L 33/20 (2013.01); H01L 33/22 (2013.01); H01L 2933/0091 (2013.01);
Abstract

A method for producing a thin-film semiconductor body is provided. A growth substrate is provided. A semiconductor layer with funnel-shaped and/or inverted pyramid-shaped recesses is epitaxially grown onto the growth substrate. The recesses are filled with a semiconductor material in such a way that pyramid-shaped outcoupling structures arise. A semiconductor layer sequence with an active layer is applied on the outcoupled structures. The active layer is suitable for generating electromagnetic radiation. A carrier is applied onto the semiconductor layer sequence. At least the semiconductor layer with the funnel-shaped and/or inverted pyramid-shaped recesses is detached, such that the pyramid-shaped outcoupling structures are configured as projections on a radiation exit face of the thin-film semiconductor body.


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