The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
May. 09, 2013
International Business Machines Corporation, Armonk, NY (US);
Natalie B. Feilchenfeld, Jericho, VT (US);
Qizhi Liu, Lexington, MA (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
A collector region is formed between insulating shallow trench isolation regions within a substrate. A base material is epitaxially grown on the collector region and the shallow trench isolation regions. The base material forms a base region on the collector region and extrinsic base regions on the shallow trench isolation regions. Further, a sacrificial emitter structure is patterned on the base region and sidewall spacers are formed on the sacrificial emitter structure. Planar raised base structures are epitaxially grown on the base region and the extrinsic base regions, and the upper layer of the raised base structures is oxidized. The sacrificial emitter structure is removed to leave an open space between the sidewall spacers and an emitter is formed within the open space between the sidewall spacers. The upper layer of the raised base structures comprises a planar insulator electrically insulating the emitter from the raised base structures.