The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Jul. 31, 2007
Kadthala Ramaya Narendrnath, San Jose, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Xinglong Chen, San Jose, CA (US);
Sudhir Gondhalekar, Fremont, CA (US);
Muhammad Rasheed, Fremont, CA (US);
Tony Kaushal, Cupertino, CA (US);
Kadthala Ramaya Narendrnath, San Jose, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Xinglong Chen, San Jose, CA (US);
Sudhir Gondhalekar, Fremont, CA (US);
Muhammad Rasheed, Fremont, CA (US);
Tony Kaushal, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method for refurbishing at least a portion of an electrostatic chuck. The method comprises removing a first dielectric component from a fluid distribution element of the electrostatic chuck and replacing the first dielectric component with a second dielectric component.