The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Mar. 02, 2012
Todd Dunn, Cave Creek, AZ (US);
Carl White, Gilbert, AZ (US);
Michael Halpin, Scottsdale, AZ (US);
Eric Shero, Phoenix, AZ (US);
Jerry Winkler, Gilbert, AZ (US);
Todd Dunn, Cave Creek, AZ (US);
Carl White, Gilbert, AZ (US);
Michael Halpin, Scottsdale, AZ (US);
Eric Shero, Phoenix, AZ (US);
Jerry Winkler, Gilbert, AZ (US);
ASM IP Holding, Almere, NL;
Abstract
A substrate supporting assembly in a reaction space includes a heater, a substrate support member, and a shim positioned between the heater and the substrate support member. The shim may be removably secured between the heater and the substrate support member. The shim may further include an inner surface defining a perimeter of a gap. The gap may be further defined by a bottom surface of the substrate support member and a top surface of the heater. The substrate support member may further include a shoulder positioned radially outside of a substrate support position and wherein the shim inner surface is radially aligned with the substrate support member shoulder.