The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 01, 2015

Filed:

Oct. 21, 2008
Applicants:

Olkan Cuvalci, Sunnyvale, CA (US);

Yu Chang, San Jose, CA (US);

William Kuang, Sunnyvale, CA (US);

Anqing Cui, Sunnyvale, CA (US);

Seshadri Ganguli, Sunnyvale, CA (US);

Inventors:

Olkan Cuvalci, Sunnyvale, CA (US);

Yu Chang, San Jose, CA (US);

William Kuang, Sunnyvale, CA (US);

Anqing Cui, Sunnyvale, CA (US);

Seshadri Ganguli, Sunnyvale, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3244 (2013.01); C23C 16/455 (2013.01); H01J 37/32091 (2013.01); H01J 37/32541 (2013.01);
Abstract

A bridge assembly includes an electrically insulating hollow tube or bridge having a pair of ends, the bridge being supported at one of the ends over the cylindrical side wall and being supported at the other of the ends over the electrode. The bridge assembly further includes a set of conductive rings surrounding the hollow tube and spaced from one another along the length of the bridge, and plural electrically resistive elements. Each of the resistive elements has a pair of flexible connectors, respective ones the resistive elements connected at their flexible connectors between respective pairs of the rings to form a series resistor assembly.


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