The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Oct. 03, 2013
Applicant:
Lite-on IT Corporation, Taipei, TW;
Inventors:
Yu-Nan Tsai, Hsinchu, TW;
Kai-Wen Cheng, Hsinchu, TW;
Chia-Hao Hsu, Hsinchu, TW;
Chun-Lai Hsiao, Hsinchu, TW;
Assignee:
Lite-On Technology Corporation, Taipei, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 27/26 (2006.01); G02B 1/00 (2006.01); H03L 1/00 (2006.01); G01D 5/24 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
G02B 1/00 (2013.01); G01D 5/24 (2013.01); H03L 1/00 (2013.01); H01L 21/00 (2013.01); H03L 2207/00 (2013.01);
Abstract
A detection circuit is provided. A detection signal corresponding to an equivalent capacitance value of a micro-electro-mechanical system is generated by an oscillator, and the equivalent capacitance value of the micro-electro-mechanical system varies with a location of the micro-electro-mechanical system.