The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Nov. 08, 2012
Applicant:
Zygo Corporation, Middlefield, CT (US);
Inventor:
Vivek G. Badami, Higganum, CT (US);
Assignee:
Zygo Corporation, Middlefield, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01); G03B 27/52 (2006.01); G03B 27/58 (2006.01); G03B 27/62 (2006.01); G01B 11/14 (2006.01); G03F 7/20 (2006.01); G01B 9/02 (2006.01); G01D 5/347 (2006.01);
U.S. Cl.
CPC ...
G01B 11/14 (2013.01); G01B 9/02049 (2013.01); G01D 5/34753 (2013.01); G03F 7/7085 (2013.01); G03F 7/70258 (2013.01); G03F 7/70775 (2013.01); G03F 7/70825 (2013.01); G03F 7/70858 (2013.01);
Abstract
Disclosed is an apparatus including a mechanical reference frame and a rigid object mechanically coupled to the reference frame by two or more constraints. The stiffnesses of at least two of the constraints are different from one another, and the relative locations and stiffnesses of the constraints cause a designated point on the rigid object to remain stationary with respect to the reference frame during thermal expansion of the rigid object over a range of temperatures.