The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Jul. 23, 2014
Applicant:
Gigaphoton Inc., Tochigi, JP;
Inventors:
Miwa Igarashi, Tochigi, JP;
Yukio Watanabe, Tochigi, JP;
Kouji Ashikawa, Tochigi, JP;
Norio Iwai, Tochigi, JP;
Osamu Wakabayashi, Tochigi, JP;
Assignee:
GIGAPHOTON INC., Tochigi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/04 (2006.01); H05G 2/00 (2006.01); G21K 5/10 (2006.01);
U.S. Cl.
CPC ...
H05G 2/008 (2013.01); G21K 5/10 (2013.01); H05G 2/003 (2013.01);
Abstract
An apparatus for generating extreme ultraviolet light may include a reference member, a chamber fixed to the reference member, the chamber including at least one window, a laser beam introduction optical system configured to introduce an externally supplied laser beam into the chamber through the at least one window, and a positioning mechanism configured to position the laser beam introduction optical system to the reference member.