The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 24, 2015

Filed:

Jan. 14, 2015
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventor:

Yao-Fu Chan, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/528 (2006.01); H01L 23/48 (2006.01); H01L 23/522 (2006.01); H01L 21/8229 (2006.01);
U.S. Cl.
CPC ...
H01L 23/48 (2013.01); H01L 23/5221 (2013.01); H01L 21/8229 (2013.01); H01L 23/528 (2013.01);
Abstract

A pad structure including a plurality of staircase structures is provided. The staircase structures are disposed on the substrate. Each of the staircase structures includes a plurality of conductor layers and a plurality of dielectric layers that are alternately stacked. Two adjacent staircase structures are connected with each other by sharing the conductor layers and the dielectric layers and are arranged in parallel along a first direction. One of the two adjacent staircase structures includes at least one staircase portion that gradually decreases in height along a second direction, and the other of the two adjacent staircase structures includes at least one staircase portion that gradually decreases in height along a direction opposite to the second direction.


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