The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Jun. 22, 2011
Yoshiyuki Kobayashi, Nirasaki, JP;
Jun Watanabe, Shibukawa, JP;
Takuya Okada, Omuta, JP;
Tomoyuki Nara, Shibukawa, JP;
Yoshiyuki Kobayashi, Nirasaki, JP;
Jun Watanabe, Shibukawa, JP;
Takuya Okada, Omuta, JP;
Tomoyuki Nara, Shibukawa, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
There is provided a focus ring capable of preventing a part of a heat transfer sheet from adhering to and remaining on a mounting table. The focus ring is arranged to surround a periphery of a substrate mounted on the mounting table having a temperature control device. Further, the focus ring includes a flexible heat transfer sheet. Furthermore, the focus ring is in contact with the mounting table via the heat transfer sheet, and the heat transfer sheet has a contact surface in contact with the mounting table and an anti-adhesion layer formed on the contact surface.