The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Nov. 25, 2013
Applicants:
Hyo-young Kwon, Uiwang-si, KR;
Min-gyum Kim, Uiwang-si, KR;
Jun-ho Lee, Uiwang-si, KR;
Hwan-sung Cheon, Uiwang-si, KR;
Inventors:
Hyo-Young Kwon, Uiwang-si, KR;
Min-Gyum Kim, Uiwang-si, KR;
Jun-Ho Lee, Uiwang-si, KR;
Hwan-Sung Cheon, Uiwang-si, KR;
Assignee:
CHEIL INDUSTRIES, INC., Gumi-si, Kyeongsangbuk-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01); G03F 7/09 (2006.01);
U.S. Cl.
CPC ...
G03F 7/092 (2013.01);
Abstract
A resist underlayer composition, a method of forming patterns, and semiconductor integrated circuit device, the composition including a solvent; and a compound including a moiety represented by the following Chemical Formula 1: