The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Mar. 18, 2013
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Mitsuyoshi Miyazono, Nirasaki, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/20 (2006.01); G01R 31/26 (2014.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2601 (2013.01); G01R 31/2887 (2013.01); G01R 31/2891 (2013.01);
Abstract
A probe apparatus is provided, comprising a card clamp mechanism configured to detachably clamp a probe card equipped with a plurality of probes; a wafer chuck configured to mount a semiconductor wafer thereon and configured to provide contact between electrodes formed in the semiconductor wafer with the probes of the probe card clamped by the card clamp mechanism with an operation of a drive mechanism; and a card movement mechanism configured to move the card clamp mechanism and the probe card clamped by the card clamp mechanism to at least two positions spaced at a predetermined distance.