The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
May. 21, 2011
Applicant:
Jun-fei Zheng, Westport, CT (US);
Inventor:
Jun-Fei Zheng, Westport, CT (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 45/00 (2006.01); C22C 28/00 (2006.01); C23C 16/30 (2006.01);
U.S. Cl.
CPC ...
H01L 45/065 (2013.01); C22C 28/00 (2013.01); C23C 16/305 (2013.01); H01L 45/06 (2013.01); H01L 45/144 (2013.01); H01L 45/1608 (2013.01); H01L 45/1683 (2013.01);
Abstract
A chalcogenide alloy composition, having an atomic composition comprising from 34 to 45 Ge, from 2 to 16% Sb, from 48 to 55% Te, from 3 to 15% carbon and from 1 to 10% nitrogen, wherein all atomic percentages of all components of the film total to 100 atomic %. Material of such composition is useful to form phase change films, e.g., as conformally coated on a phase change memory device substrate to fabricate a phase change random access memory cell.