The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 17, 2015

Filed:

Dec. 21, 2012
Applicant:

Spansion Llc, Sunnyvale, CA (US);

Inventors:

Meng Ding, San Jose, CA (US);

YouSeok Suh, Cupertino, CA (US);

Shenqing Fang, Fremont, CA (US);

Kuo-Tung Chang, Saratoga, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/788 (2006.01); H01L 21/762 (2006.01); H01L 21/28 (2006.01); H01L 27/115 (2006.01); H01L 29/423 (2006.01); H01L 29/792 (2006.01); H01L 27/02 (2006.01);
U.S. Cl.
CPC ...
H01L 29/788 (2013.01); H01L 21/28273 (2013.01); H01L 21/28282 (2013.01); H01L 21/762 (2013.01); H01L 21/76224 (2013.01); H01L 27/115 (2013.01); H01L 27/11521 (2013.01); H01L 27/11568 (2013.01); H01L 29/4234 (2013.01); H01L 29/42324 (2013.01); H01L 29/792 (2013.01); H01L 27/0207 (2013.01);
Abstract

An embodiment of the present invention is directed to a method of forming a memory cell. The method includes etching a trench in a substrate and filling the trench with an oxide to form a shallow trench isolation (STI) region. A portion of an active region of the substrate that comes in contact with the STI region forms a bitline-STI edge. The method further includes forming a gate structure over the active region of the substrate and over the STI region. The gate structure has a first width substantially over the center of the active region of the substrate and a second width substantially over the bitline-STI edge, and the second width is greater than the first width.


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