The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
Jul. 11, 2014
Applicant:
Jsmsw Technology Llc, Walnut Creek, CA (US);
Inventor:
Hwan J. Jeong, Los Altos, CA (US);
Assignee:
JSMSW Technology LLC, Walnut Creek, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06K 9/62 (2006.01); G06T 7/00 (2006.01); G06K 9/74 (2006.01); G03F 7/20 (2006.01); G01N 21/956 (2006.01);
U.S. Cl.
CPC ...
G06K 9/6202 (2013.01); G03F 7/70633 (2013.01); G06K 9/74 (2013.01); G06T 7/001 (2013.01); G01N 21/956 (2013.01); G06T 2207/30148 (2013.01);
Abstract
Overlay measurement systems and methods are disclosed that control the relative phase between the scattered and specular components of light to amplify weak optical signals before detection. The systems and methods utilize model-based regressional image processing to determine overlay errors accurately even in the presence of inter-pattern interference.