The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
Aug. 30, 2012
Kentaro Kasa, Kanagawa-ken, JP;
Manabu Takakuwa, Kanagawa-ken, JP;
Ryoichi Inanami, Kanagawa-ken, JP;
Kazuto Matsuki, Tokyo, JP;
Tetsuro Nakasugi, Kanagawa-ken, JP;
Hiroshi Koizumi, Kanagawa-ken, JP;
Minoru Inomoto, Kanagawa-ken, JP;
Kentaro Kasa, Kanagawa-ken, JP;
Manabu Takakuwa, Kanagawa-ken, JP;
Ryoichi Inanami, Kanagawa-ken, JP;
Kazuto Matsuki, Tokyo, JP;
Tetsuro Nakasugi, Kanagawa-ken, JP;
Hiroshi Koizumi, Kanagawa-ken, JP;
Minoru Inomoto, Kanagawa-ken, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
According to one embodiment, a substrate holding apparatus includes a main unit and a plurality of first support units. The main unit has a major surface. The main unit has a plate configuration. The first support units are disposed on the major surface. Each of the first support units includes a suction-holding unit capable of holding a substrate by suction. The suction-holding unit is movable along a first direction perpendicular to the major surface and a second direction parallel to the major surface.