The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 17, 2015

Filed:

Sep. 02, 2010
Applicants:

Hidenori Miyamoto, Kawasaki, JP;

Kenji Maruyama, Kawasaki, JP;

Tadahiko Hirakawa, Kawasaki, JP;

Koichi Misumi, Kawasaki, JP;

Inventors:

Hidenori Miyamoto, Kawasaki, JP;

Kenji Maruyama, Kawasaki, JP;

Tadahiko Hirakawa, Kawasaki, JP;

Koichi Misumi, Kawasaki, JP;

Assignee:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C 11/00 (2006.01); B05C 11/10 (2006.01); B05C 5/00 (2006.01); C23C 16/52 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 31/0216 (2014.01); H01L 31/032 (2006.01); H01L 31/18 (2006.01); B41J 2/045 (2006.01);
U.S. Cl.
CPC ...
B05C 11/1015 (2013.01); B05C 5/005 (2013.01); C23C 16/52 (2013.01); H01L 21/6715 (2013.01); H01L 21/6776 (2013.01); H01L 21/67173 (2013.01); H01L 31/02167 (2013.01); H01L 31/0322 (2013.01); H01L 31/18 (2013.01); B41J 2/04566 (2013.01); Y02E 10/541 (2013.01);
Abstract

A coating apparatus including a coating part which applies a liquid material including an oxidizable metal on a substrate, a chamber having a coating space in which the coating part applies the liquid material on the substrate and a transport space into which the substrate is transported, and a removal unit which removes the liquid material from the inside of the chamber when at least one of oxygen concentration and humidity inside the chamber exceeds a threshold value.


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