The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2015
Filed:
Mar. 12, 2014
Tokyo Electron Limited, Minato-ku, JP;
Masahiro Yoshida, Koshi, JP;
TOKYO ELECTRON LIMITED, Minato-ku, JP;
Abstract
A substrate transfer apparatus includes a substrate transfer device which loads and unloads multiple substrates into and from a cassette capable of accommodating the multiple substrates, a substrate detector device which detects the positions of the substrates in the cassette, and a control device which controls the transfer device. The control device includes a computation component which calculates a shifted amount between a base position and the position of each substrate such that the shifted amount from the base position is set as a positive value, a verification component which verifies whether the difference between the maximum and minimum values among the shifted amounts is equal to or less a threshold value, and a transfer control component which controls the transfer device such that the transfer device unloads the substrates from the cassette when the verification component verifies that the difference is equal to or less than the threshold value.