The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2015

Filed:

Oct. 05, 2011
Applicants:

Ryozo Takihana, Kawagoe, JP;

Satoru Narizuka, Saitama, JP;

Inventors:

Ryozo Takihana, Kawagoe, JP;

Satoru Narizuka, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 309/10 (2006.01); C07C 381/12 (2006.01); C08F 20/38 (2006.01); C08F 220/26 (2006.01); C08F 232/04 (2006.01); C08F 28/02 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 309/10 (2013.01); C07C 381/12 (2013.01); C08F 20/38 (2013.01); C08F 28/02 (2013.01); C08F 220/26 (2013.01); C08F 232/04 (2013.01); G03F 7/00 (2013.01); G03F 7/0046 (2013.01); G03F 7/0382 (2013.01); G03F 7/0392 (2013.01); G03F 7/0397 (2013.01); G03F 7/20 (2013.01); G03F 7/2039 (2013.01); G03F 7/2041 (2013.01); C07C 2101/14 (2013.01);
Abstract

A sulfonate resin having a repeating unit of the following general formula (3): where X each independently represents a hydrogen atom or a fluorine atom; n represents an integer of 1 to 10; Rrepresents a hydrogen atom, a halogen atom, a C-Calkyl group or a C-Cfluorine-containing alkyl group; Rrepresents either RO or RRN; and Mrepresents a monovalent cation. The sulfonate resin has an onium sulfonate incorporated in a side chain thereof with an anion moiety of the sulfonate salt fixed to the resin and can suitably be used as a resist resin having a high solubility in propylene glycol monomethyl ether acetate.


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