The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2015
Filed:
Apr. 30, 2012
Vincent Sylvester Kuiper, The Hague, NL;
Erwin Slot, Zoetermeer, NL;
Marcel Nicolaas Jacobus Van Kervinck, The Hague, NL;
Guido DE Boer, Leerdam, NL;
Hendrik Jan DE Jong, The Hague, NL;
Vincent Sylvester Kuiper, The Hague, NL;
Erwin Slot, Zoetermeer, NL;
Marcel Nicolaas Jacobus Van Kervinck, The Hague, NL;
Guido De Boer, Leerdam, NL;
Hendrik Jan De Jong, The Hague, NL;
MAPPER LITHOGRAPHY IP B.V., Delft, NL;
Abstract
An apparatus for transferring substrates within a lithography system, the lithography system comprising a substrate preparation unit for clamping a substrate onto a substrate support structure to form a clamped substrate, and an interface with a substrate supply system for receiving unclamped substrates. The apparatus comprises a body provided with a first set of fingers for carrying an unclamped substrate and a second set of fingers for carrying a substrate support structure, and the first set of fingers is located below the second set of fingers, and fingers of the first set of fingers have a different shape than the fingers of the second set of fingers.