The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2015
Filed:
Apr. 01, 2014
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventor:
Howard S. Landis, Underhill, VT (US);
Assignee:
GLOBALFOUNDRIES U.S. 2 LLC, Hopewell Junction, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G03F 1/36 (2012.01); G03F 7/20 (2006.01); G03F 1/44 (2012.01);
U.S. Cl.
CPC ...
G03F 1/36 (2013.01); G06F 17/5068 (2013.01); G03F 1/44 (2013.01); G03F 7/705 (2013.01); G03F 7/70441 (2013.01);
Abstract
Near-neighbor trimming of dummy fill shapes with built-in optical proximity corrections (OPCs) for semiconductor applications is provided. A method for the near-neighbor trimming includes adding one or more hole shapes onto a semiconductor design layout comprising a plurality of design shapes. The method further includes trimming adjacent ones of the plurality of which are covered by the one or more hole shapes.