The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2015

Filed:

Mar. 25, 2013
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Balaji Jayaraman, Bangalore, IN;

Kota V. R. M. Murali, Bangalore, IN;

Edward J. Nowak, Essex Junction, VT (US);

Ninad D. Sathaye, Pune, IN;

Rajesh Sathiyanarayanan, Chennai, IN;

Assignee:

GLOBALFOUNDRIES U.S. 2 LLC, Hopewell Junction, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 7/00 (2006.01); G01L 9/00 (2006.01); G01K 7/01 (2006.01); G01N 27/414 (2006.01); G01N 27/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0042 (2013.01); G01K 7/015 (2013.01); G01N 27/4141 (2013.01); G01N 27/002 (2013.01);
Abstract

A workfunction modulation-based sensor comprising a field-effect transistor (FET). The FET comprises a substrate, a gate dielectric, a metal gate, a source, a drain, and a layer of sensing material that is electrically connected to the metal gate. An electrical connection that connects to the source of the FET. An electrical connection that connects to the drain of the FET. An electrical connection that connects to the layer of sensing material. An environment that includes an adsorbate gas surrounding, at least a portion of, the layer of sensing material. Wherein the sensing material is adapted to adsorb, at least in part, the adsorbate gas. The amount of adsorbate gas adsorbed on the layer of sensing material modulates the workfunction of the FET such that the degree of adsorbate gas adsorption corresponds to one of the temperature or pressure associated with the environment of the FET.


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