The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2015
Filed:
Aug. 28, 2012
Michael Christopher Sarin, Phoenix, AZ (US);
Rafael Mendez, Phoenix, AZ (US);
Gregory M. Bartlett, Phoenix, AZ (US);
Eric Hill, Phoenix, AZ (US);
Keith R. Lawson, Phoenix, AZ (US);
Andy Rosser, Bristol, GB;
Michael Christopher Sarin, Phoenix, AZ (US);
Rafael Mendez, Phoenix, AZ (US);
Gregory M. Bartlett, Phoenix, AZ (US);
Eric Hill, Phoenix, AZ (US);
Keith R. Lawson, Phoenix, AZ (US);
Andy Rosser, Bristol, GB;
ASM IP Holding B.V., Almere, NL;
Abstract
A method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a mass flow controller used with a tool for semiconductor or solar cell fabrication. To verify the mass flow rate measured by the mass flow controller, gas passing through the mass flow controller is also passed through a mass flow meter. The measured flow rate through the mass flow controller is compared to the measured flow rate through the mass flow meter and any difference between the two measured flow rates is determined. Depending upon the magnitude of any difference, the flow of gas to the mass flow controller may be altered.