The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2015

Filed:

Sep. 03, 2012
Applicants:

Christopher Cordonier, Kanagawa, JP;

Mitsuhiro Nabeshima, Kanagawa, JP;

Shingo Kumagai, Kanagawa, JP;

Naoki Takahashi, Kanagawa, JP;

Inventors:

Christopher Cordonier, Kanagawa, JP;

Mitsuhiro Nabeshima, Kanagawa, JP;

Shingo Kumagai, Kanagawa, JP;

Naoki Takahashi, Kanagawa, JP;

Assignee:

JCU CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); C09K 13/02 (2006.01); C23F 1/38 (2006.01); C23F 1/40 (2006.01); C23F 1/36 (2006.01); C23F 1/44 (2006.01); C03C 15/00 (2006.01);
U.S. Cl.
CPC ...
C09K 13/02 (2013.01); C03C 15/00 (2013.01); C23F 1/36 (2013.01); C23F 1/38 (2013.01); C23F 1/40 (2013.01); C23F 1/44 (2013.01);
Abstract

A layer of a metal selected from titanium, niobium, tungsten, molybdenum, ruthenium, rhodium, arsenic, aluminum and gallium, an oxide of the metal, a nitride of the metal, silicon nitride, hafnium nitride, tantalum nitride, or an alloy of these metals, the layer being provided on an underlying base material selected from glass, silicon, copper and nickel, is selectively etched with an alkaline etching solution containing a predefined complexing agent.


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