The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2015
Filed:
Feb. 22, 2013
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Chih-Wei Kuo, Tainan, TW;
Yuan-Shun Chao, Zhubel, TW;
Hou-Yu Chen, Zhubel, TW;
Shyh-Horng Yang, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A FinFET device and a method for fabricating a FinFET device is disclosed. An exemplary FinFET device includes a substrate including a fin structure, the fin structure including a first and a second fin. The FinFET device further includes a shallow trench isolation (STI) feature disposed on the substrate and between the first and the second fins. The FinFET device further includes a gate dielectric disposed on the first and the second fins. The FinFET device further includes a gate structure disposed on the gate dielectric. The gate structure traverses the first fin, the second fin, and the STI feature between the first fin and the second fin and has a longitudinal stepped profile.