The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2015

Filed:

Mar. 01, 2013
Applicant:

Infineon Technologies Austria Ag, Villach, AT;

Inventors:

Hans-Joachim Schulze, Taufkirchen, DE;

Hans Weber, Bayerisch Gmain, DE;

Roman Knoefler, Villach, AT;

Franz Hirler, Isen, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01); H01L 29/165 (2006.01); H01L 29/78 (2006.01); H01L 29/06 (2006.01); H01L 29/10 (2006.01); H01L 21/761 (2006.01); H01L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 29/165 (2013.01); H01L 21/761 (2013.01); H01L 29/0646 (2013.01); H01L 29/0878 (2013.01); H01L 29/1095 (2013.01); H01L 29/78 (2013.01); H01L 29/7802 (2013.01);
Abstract

A semiconductor device is provided. The semiconductor device includes a semiconductor body having a main surface. In a vertical cross-section which is substantially orthogonal to the main surface the semiconductor body includes a vertical trench, an n-type silicon semiconductor region, and two p-type silicon semiconductor regions each of which adjoins the n-type silicon semiconductor region and is arranged between the n-type silicon semiconductor region and the main surface. The vertical trench extends from the main surface at least partially into the n-type silicon semiconductor region and includes a compound semiconductor region which includes silicon and germanium and is arranged between the two p-type silicon semiconductor regions. The compound semiconductor region and the two p-type silicon semiconductor regions include n-type dopants and p-type dopants. An integrated concentration of the n-type dopants of the compound semiconductor region is larger than an integrated concentration of the p-type dopants of the compound semiconductor region.


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