The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2015
Filed:
Nov. 28, 2012
Tokyo Electron Limited, Tokyo, JP;
Tsutomu Hiroki, Nirasaki, JP;
Ikuo Sawada, Kawasaki, JP;
Kazuyoshi Matsuzaki, Tsukuba, JP;
Yoshiki Fukuhara, Tsukuba, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A conveyance device, which conveys wafers in a casing, includes a primary blowing fanthat generates airflow within the casingin a first direction; a discharge openingthat is located at a downstream side of the airflow generated by the primary blowing fan, is interconnected with the interior of the casing, and discharges gases at the interior of the casingoutside of the casing; a basethat is supported by a gate-shaped conveyance armdisposed within the casingand moves within the casingat the upstream side of the discharge openingand at the downstream side of the primary blowing fan; an end effectorthat is located at the baseand that carries wafers; and a blowing fanthat is located at the base and that generates airflow in the first direction.