The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2015
Filed:
Sep. 11, 2012
Applicant:
Jerry Johannes Martinus Peijster, Maartensdijk, NL;
Inventor:
Jerry Johannes Martinus Peijster, Maartensdijk, NL;
Assignee:
MAPPER LITHOGRAPHY IP B.V., Delft, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16C 29/00 (2006.01); G03F 7/20 (2006.01); F16C 29/04 (2006.01); F16C 29/12 (2006.01);
U.S. Cl.
CPC ...
F16C 29/002 (2013.01); F16C 29/04 (2013.01); F16C 29/123 (2013.01); G03F 7/2014 (2013.01); G03F 7/70816 (2013.01); F16C 2370/00 (2013.01);
Abstract
The invention relates to a target processing tool, comprising a target carrier guidance assembly, said target carrier guidance assembly comprising: