The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Jan. 08, 2014
Applicant:
Carl Zeiss Microscopy Ltd., Cambridge, GB;
Inventors:
Edward Hill, St. Ives, GB;
Stewart Bean, Wyton, GB;
Assignee:
Carl Zeiss Microscopy Ltd., Cambridge, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); G01N 23/225 (2006.01);
U.S. Cl.
CPC ...
H01J 37/26 (2013.01); G01N 23/2254 (2013.01); H01J 2237/2804 (2013.01); H01J 2237/2806 (2013.01); H01J 2237/2808 (2013.01); H01J 2237/2809 (2013.01);
Abstract
The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.