The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Jan. 14, 2014
Applicant:
Fei Company, Hillsboro, OR (US);
Inventor:
Frank Nederlof, Nuenen, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); G01N 23/22 (2006.01); G01N 23/225 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); G01N 23/2204 (2013.01); G01N 23/2251 (2013.01); H01J 2237/201 (2013.01); H01J 2237/26 (2013.01);
Abstract
The invention relates to a sample carrier for a transmission electron microscope. When using state of the art sample carriers, such as half-moon grids in combination with detectors detecting, for example, X-rays emitted at a large emittance angle, shadowing is a problem. Similar problems occur when performing tomography, in which the sample is rotated over a large angle. The invention provides a solution to shadowing by forming the parts of the grid bordering the interface between sample and grid as tapering parts.