The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2015

Filed:

Aug. 02, 2012
Applicant:

Hans-joachim Weippert, Aalen, DE;

Inventor:
Assignee:

Carl Zeiss SMT GmbH, Oberkochen, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 27/38 (2006.01); G03F 7/20 (2006.01); G02B 5/20 (2006.01); G02B 5/22 (2006.01); B82Y 20/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/70341 (2013.01); B32B 27/38 (2013.01); B82Y 20/00 (2013.01); G02B 5/206 (2013.01); G02B 5/208 (2013.01); G02B 5/22 (2013.01); G03F 7/70958 (2013.01); G02B 2207/101 (2013.01); Y10T 428/31511 (2015.04);
Abstract

An optical component for transmitting radiation includes a radiation protective layer, which includes at least one oxide material selected from germanium dioxide (GeO), antimony pentoxide (SbO), aluminum oxide (AlO), niobium(V) oxide (NbO), tin oxide (SnO), metal oxides of rare earths, in particular lanthanum oxide (LaO) or cerium oxide (CeO), yttrium oxide (YO), yttrium aluminum oxides, zinc oxide (ZnO), indium oxide (InO), bismuth trioxide (BiO), barium titanate (BaTiO) and spinels, such as magnesium aluminate (MgAlO). The radiation protective layer can be varnish-like, and the oxide material can be contained in a binder of the varnish-like radiation protective layer.


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