The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
May. 11, 2012
Applicants:
Masayuki Kawase, Ota-Ku, JP;
Takashi Mori, Ota-Ku, JP;
Ryoji Tanimoto, Ota-ku, JP;
Inventors:
Assignee:
Disco Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23Q 11/10 (2006.01); B23C 3/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B23C 3/00 (2013.01); B23Q 11/1061 (2013.01); H01L 21/67092 (2013.01); B23B 2222/44 (2013.01); B23B 2222/84 (2013.01); B23B 2226/31 (2013.01); B23B 2250/12 (2013.01); B23C 2222/84 (2013.01); B23C 2226/31 (2013.01); B23C 2250/12 (2013.01); Y10T 409/50082 (2015.01); Y10T 409/500984 (2015.01);
Abstract
A tool cutting apparatus includes a chuck table for holding a workpiece, and rotatable cutting means having a cutting tip for cutting the front side of the workpiece. Pure water and an additive are mixed to prepare a cutting fluid, and a cutting fluid nozzle supplies the cutting fluid to the cutting tip and the workpiece held on the chuck table.