The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2015
Filed:
May. 30, 2012
Byung Chul Kang, Cheonan-si, KR;
Byung Man Kang, Cheonan-si, KR;
Donghyuk Jang, Cheonan-si, KR;
Seong-soo Kim, Cheonan-si, KR;
Byung Chul Kang, Cheonan-si, KR;
Byung Man Kang, Cheonan-si, KR;
Donghyuk Jang, Cheonan-si, KR;
Seong-soo Kim, Cheonan-si, KR;
SEMES CO., LTD., Chungcheongnam-Do, KR;
Abstract
Provided is a substrate processing apparatus. The substrate processing apparatus includes an index part including a port on which a container containing a substrate is placed and an index robot, a processing part for processing the substrate, and a buffer unit disposed between the processing part and the index part to allow the substrate transferred between the processing part and the index part to be temporarily stayed therein. The processing part includes a glue removal processing module, a substrate cooling processing module, a heat processing module, and a functional water processing module which are disposed along a transfer passage for transferring the substrate.