The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2015
Filed:
Jun. 09, 2014
Applicants:
Cha-won Koh, Yongin-si, KR;
Hyun-woo Kim, Seongnam-si, KR;
Jeon-il Lee, Suwon-si, KR;
Hyo-sung Lee, Suwon-si, KR;
Inventors:
Cha-Won Koh, Yongin-si, KR;
Hyun-Woo Kim, Seongnam-si, KR;
Jeon-Il Lee, Suwon-si, KR;
Hyo-Sung Lee, Suwon-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/112 (2006.01); H01L 21/3065 (2006.01); H01L 21/283 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11286 (2013.01); H01L 21/283 (2013.01); H01L 21/3065 (2013.01);
Abstract
Semiconductor devices and methods of fabricating the same are provided. The methods include preparing a template having a three dimensional (3D) stair type structure formed in intaglio, forming an imprint pattern having the stair type structure using the template, and simultaneously forming stair type patterns on a substrate using the imprint pattern.