The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2015
Filed:
Jul. 17, 2013
Globalfoundries, Inc., Grand Cayman, KY;
Kristina Trevino, Austerlitz, NY (US);
Yuan-Hung Lin, Cahoes, NY (US);
Gabriel Padron Wells, Saratoga Springs, NY (US);
Chang Ho Maeng, Clifton Park, NY (US);
Taejoon Han, Clifton Park, NY (US);
Hoong Shing Wong, Clifton Park, NY (US);
GLOBALFOUNDRIES, INC., Grand Cayman, KY;
Abstract
Integrated circuits having replacement metal gates with improved threshold voltage performance and methods for fabricating such integrated circuits are provided. A method includes providing a dielectric layer overlying a semiconductor substrate. The dielectric layer has a first and a second trench. A gate dielectric layer is formed in the first and second trench. A first barrier layer is formed overlying the gate dielectric layer. A work function material layer is formed within the trenches. The work function material layer and the first barrier layer are recessed in the first and second trench. The work function material layer and the first barrier layer form a beveled surface. The gate dielectric layer is recessed in the first and second trench. A conductive gate electrode material is deposited such that it fills the first and second trench. The conductive gate electrode material is recessed in the first and second trench.