The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2015
Filed:
Jan. 02, 2012
Applicants:
Shimon Koren, Haifa, IL;
OR Shur, Haifa, IL;
Gilad Golan, Raanana, IL;
Inventors:
Shimon Koren, Haifa, IL;
Or Shur, Haifa, IL;
Yacov Malinovich, Kiryat Tivon, IL;
Gilad Golan, Raanana, IL;
Assignee:
CAMTEK LTD., Migdal Haemek, IL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K 9/32 (2006.01); G06K 9/00 (2006.01); G02B 21/00 (2006.01); G01N 21/956 (2006.01); G01B 11/06 (2006.01);
U.S. Cl.
CPC ...
G06K 9/00127 (2013.01); G01N 21/95607 (2013.01); G01N 21/95684 (2013.01); G02B 21/0016 (2013.01); G01B 11/0608 (2013.01); G02B 21/0056 (2013.01);
Abstract
A method and device for measuring a height of a microscopic structure such as solder bumps. For simplicity of explanation, the invention is described with respect to phase information and amplitude information wherein phase detection and calculation algorithms are being used.