The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2015
Filed:
Sep. 07, 2012
Applicants:
Pieter Kappelhof, Delft, NL;
Jerry Johannes Martinus Peijster, Maartensdijk, NL;
Dennis Kemperman, Voorhout, NL;
Inventors:
Pieter Kappelhof, Delft, NL;
Jerry Johannes Martinus Peijster, Maartensdijk, NL;
Dennis Kemperman, Voorhout, NL;
Assignee:
MAPPER LITHOGRAPHY IP B.V., Deleft, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/707 (2013.01); G03F 7/70783 (2013.01);
Abstract
The invention relates to a support structure for supporting a wafer table in a lithography system, said support structure comprising: