logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9146093 B1

PDFFull Text
Date of Patent:
Sep. 29, 2015

Filed:

Nov. 08, 2012

Non-harmonic cyclic error compensation in interferometric encoder systems

Applicant:

Zygo Corporation, Middlefield, CT (US);

Inventor:

Frank C. Demarest, Higganum, CT (US);

Assignee:

Zygo Corporation, Middlefield, CT (US);

Attorney:

Fish & Richardson P.C.

Primary Examiner:

Colin Kreutzer

Int. Cl.
CPC ...
G01B 11/02 (2006.01); G01B 11/14 (2006.01); G03B 27/32 (2006.01); G03B 27/58 (2006.01); G03B 27/62 (2006.01); H02K 41/02 (2006.01); H02K 41/03 (2006.01); G03F 7/20 (2006.01); H01L 21/68 (2006.01); G03F 9/00 (2006.01); G01B 9/02 (2006.01); G01D 5/38 (2006.01);
U.S. Cl.
CPC ...
G01B 11/14 (2013.01); G01B 9/02059 (2013.01); G01D 5/38 (2013.01); G03B 27/58 (2013.01); G03F 7/70775 (2013.01); G03F 9/7049 (2013.01); G03F 9/7092 (2013.01); H01L 21/681 (2013.01);
Abstract

A method includes obtaining, from a detector of an interferometry system, an interference signal based on a combination of a first beam and a reference beam, subsequent to the first beam being diffracted by an encoder scale, obtaining, through an electronic processor, an error compensation signal based on a non-harmonic cyclic error that modifies the interference signal, and outputting information about a change in a position of the encoder scale relative to an optical assembly of the interferometry system based on the interference signal and the error compensation signal.

Find Patent Forward Citations

Demarest, Frank. (2015). Non-harmonic cyclic error compensation in interferometric encoder systems (U.S. Patent No. 9146093). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9146093

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…