The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2015
Filed:
Nov. 14, 2013
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Jeffrey J. Grimes, South Burlington, VT (US);
Dennis P. Hogan, Jericho, VT (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/25 (2006.01); H01L 21/68 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01B 5/25 (2013.01); H01L 21/6715 (2013.01); H01L 21/68 (2013.01);
Abstract
Methods and apparatus for adjusting an alignment of a movable component relative to a substrate holder. An alignment tool is placed on the substrate holder. A nozzle is coupled with the movable component. The movable component and the nozzle are positioned such that a planar surface of the movable component contact a planar surface of the alignment tool, and the nozzle has a non-contacting relationship with the alignment tool. The planar surface of the movable component is leveled to be parallel with the planar surface of the alignment tool.