The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2015

Filed:

Dec. 03, 2008
Applicants:

Masanori Onodera, Tokyo, JP;

Kouichi Meguro, Tokyo, JP;

Junichi Kasai, Kanagawa, JP;

Yasuhiro Shinma, Kanagawa, JP;

Koji Taya, Kanagawa, JP;

Junji Tanaka, Tokyo, JP;

Inventors:

Masanori Onodera, Tokyo, JP;

Kouichi Meguro, Tokyo, JP;

Junichi Kasai, Kanagawa, JP;

Yasuhiro Shinma, Kanagawa, JP;

Koji Taya, Kanagawa, JP;

Junji Tanaka, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/683 (2006.01); H01L 21/673 (2006.01); H01L 25/10 (2006.01); H01L 25/00 (2006.01); H01L 25/065 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); H01L 21/67336 (2013.01); H01L 25/105 (2013.01); H01L 25/50 (2013.01); H01L 25/0657 (2013.01); H01L 2224/32145 (2013.01); H01L 2225/06513 (2013.01); H01L 2225/1023 (2013.01); H01L 2225/1058 (2013.01); H01L 2924/3511 (2013.01);
Abstract

A method of producing a carrier structure for fabricating a stacked-type semiconductor device includes laminating thin plates for a lower carrier associated with an upper carrier. The method includes forming openings in the thin plates by etching or electric discharge machining. The lower carrier includes a magnet that is buried therein and the magnet maintains contact between the lower carrier and the upper carrier. A thin plate of the laminated thin plates is provided on each opposing surface of the magnet. The lower carrier further includes multiple magnets arranged around a periphery of the lower carrier and through a center region of the lower carrier that is between magnets on the periphery.


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