The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Mar. 18, 2013
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Kentaro Kadonaga, Nirasaki, JP;
Keisuke Suzuki, Nirasaki, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C23C 16/28 (2006.01); C23C 16/30 (2006.01); C23C 16/34 (2006.01); C23C 16/36 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0226 (2013.01); C23C 16/28 (2013.01); C23C 16/308 (2013.01); C23C 16/342 (2013.01); C23C 16/36 (2013.01); C23C 16/45525 (2013.01); H01L 21/0228 (2013.01); H01L 21/02126 (2013.01); H01L 21/02129 (2013.01); H01L 21/02211 (2013.01);
Abstract
According to an embodiment of the present disclosure a method of forming a boron-containing silicon oxycarbonitride film on a base is provided. The method includes forming a boron-containing film on the base, and forming the boron-containing silicon oxycarbonitride film by laminating a silicon carbonitride film and a silicon oxynitride film on the boron-containing film.