The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Jul. 31, 2012
Chia-che Wu, Taichung, TW;
Chi-shao Chen, Taichung, TW;
Che-yu Lin, Taichung, TW;
Fong-zhi Chen, Hsinchu, TW;
Fan-chun Hsieh, Hsinchu, TW;
Chia-Che Wu, Taichung, TW;
Chi-Shao Chen, Taichung, TW;
Che-Yu Lin, Taichung, TW;
Fong-Zhi Chen, Hsinchu, TW;
Fan-Chun Hsieh, Hsinchu, TW;
NATIONAL APPLIED RESEARCH LABORATORIES, Hsinchu, TW;
Abstract
A piezoelectric vacuum gauge includes an actuator with a flexible portion, an actuating unit, a sensor unit, a signal input terminal and a signal output terminal, and a fixture unit having a base portion and a cover portion. An external signal is generated by a signal generator. Receive and transmit an external signal to an actuating unit by the signal input terminal so that the actuating unit has a vibration. Prompt a flexible portion by the actuating unit to produce a first resonant motion when the actuating unit having the vibration. The first resonant motion converts into a second resonant motion because the flexible portion is subject to a damping force of ambient air. Prompt a sensor unit by the second resonant motion to cause a shape transformation of the sensor unit to generate a detecting signal. Output the detecting signal to an external instrument by a signal output terminal of sensor unit to calculate a vacuum pressure value.